Gas Delivery and Pump Line Thermal Solutions
Controlling temperature of gases delivered to a vacuum chamber and out the pump lines is essential as the industry develops new processes in alignment with the Semiconductor Technology Roadmap. Platform based tools are designed to increase throughput, but also increase the thermal management challenges involved with providing consistent deposition and etch processes. Yields increase and preventative maintenance frequency can decrease when delivery and exhaust gases are controlled within the prescribed process parameters.
Watlow's gas and pump line heating systems were developed to provide flexibility in designing the optimum heating systems. Vacuum chamber plumbing systems can create a thermal challenge because of varying thermal mass, constricted spaces and last minute layout changes. The new STRETCH-TO-LENGTH® heating system and EHG controllers are standard solutions for hard to heat gas delivery lines. Integrated as a complete package, Watlow components reduce design time and system costs. Solutions with fast delivery for abatement applications are possible because Watlow has over one thousand standard heater configurations in our design files.
Related Products
- High Uniformity Gas Delivery Line Heaters
- STRETCH-TO-LENGTH® Gas Delivery Line Heaters
- SERIES EHG Controllers
- Pump Line Heaters
- Temperature Control Consoles
Related Literature, News and Downloads
Click on the below links for more product information. PDF documents require Adobe® Reader® version 7 or higher for viewing.
| Specification Sheets & Brochures | Size/Pages |
|---|---|
| Engineering Solutions for Your Thermal Systems | 247K / 8 (PDF) |
| Pump and Gas Line Heating Systems | 752K / 20 (PDF) |
| SERIES EHG Integrated Thermal Solution | 874K / 2 (PDF) |
| Semiconductor Processing | 1,927K / 36 (PDF) |
| High Uniformity Gas and Delivery Line | 36K / 1 (PDF) |
| Temperature Control Consoles | 90K / 1 (PDF) |
| EHG SL10 Process Controller and Safety Limit | 2,037K / 4 (PDF) |
| Stretch-To-Length Heaters | 100K / 2 (PDF) |
| Cable/Coil Heaters | 84K / 2 (PDF) |
| RELIALINE™ 170 Heating System | 243K / 2 (PDF) |
| Related News Releases and Newsletters | Date |
|---|---|
| Interference Fit Construction Heaters from Watlow® Improve ... | 15-Jul-2008 |
| Large Thick Film Heaters from Watlow® Improve Temperature ... | 15-Jul-2008 |
| The EHG SL10 Integrated Controller from Watlow® is a Single ... | 15-Jul-2008 |
| Watlow Opens a Semiconductor Technology Design Center | 12-Jul-2007 |
| Watlow's Gas and Pump Line Heating Systems Offer Integrated Solutions ... | 11-Jul-2006 |
| Related Technical Documents | Size/Pages |
|---|---|
| PPC-2000 User Guide | 2,515K / 320 (PDF) |
PDF documents require Adobe® Reader® version 7 or higher for viewing.
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