Wet Process Equipment
Wet chemical solutions are the preferred method for etch and cleaning wafers in many semiconductor processes. Wet bench, CMP and hot DI water applications present challenges in an environment that has potential for wafer contamination and process variations that may cause defects and safety concerns. To meet the demands of wet process applications Watlow has developed a family of thermal components for acid, water, CO2, air and solvent applications.
Thick film quartz heating technology, because of its fast response, cleanliness and low external temperature is the foundation of what is rapidly becoming the industry's preferred method of heating chemicals.
Watlow's UNIVERSAL SOLVENT heater provides NEMA 7 enclosures and redundant cooling systems that can be incorporated for safety. RAPID RESPONSE heat exchangers and STARFLOW air heaters are used to heat gases for cleaning and drying of wafers. These heater and control solutions can be designed and supplied as a critical subsystem for OEM applications.
Related Products
- Thick Film Quartz Heater Modules
- UNIVERSAL SOLVENT Heaters
- STARFLOW Nitrogen (N2) Air Heaters
- RAPID RESPONSE Electric Heat Exchangers
Related Literature, News and Downloads
Click on the below links for more product information. PDF documents require Adobe® Reader® version 7 or higher for viewing.
| Specification Sheets & Brochures | Size/Pages |
|---|---|
| UNIVERSAL SOLVENT Circulation Heaters | 75K / 2 (PDF) |
| Semiconductor Processing | 1,927K / 36 (PDF) |
| EHG SL10 Process Controller and Safety Limit | 2,039K / 4 (PDF) |
| Thick Film Quartz Heater Modules | 209K / 8 (PDF) |
| Cable/Coil Heaters | 84K / 2 (PDF) |
| RELIALINE™ 170 Heating System | 243K / 2 (PDF) |
| Related News Releases and Newsletters | Date |
|---|---|
| Interference Fit Construction Heaters from Watlow® Improve ... | 15-Jul-2008 |
| Large Thick Film Heaters from Watlow® Improve Temperature ... | 15-Jul-2008 |
| Watlow Opens a Semiconductor Technology Design Center | 12-Jul-2007 |
| Watlow's Updated DIN-A-MITE Power Controllers Offer Exceptional Performance ... | 19-Jun-2006 |
| Watlow's Thick Film Heaters on Quartz are Ideal for Semiconductor Wet ... | 13-Jul-2004 |
| New SERIES SD from Watlow Improves Temperature Control Through Advanced ... | 14-Jul-2003 |
| Related Technical Documents | Size/Pages |
|---|---|
| PPC-2000 User Guide | 2,515K / 320 (PDF) |
PDF documents require Adobe® Reader® version 7 or higher for viewing.
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