|
MICROCOIL™
MICROCOIL surface temperature sensors are ideal for measuring chuck, internal wall, chip, heat sinks and circuit temperatures. The flexible probe design positions the sensor tip for optimal surface contact and isothermal response and accuracy.
Radio Frequency Thermocouple Probe (TR)
TR immersion temperature sensors are designed to reduce transient 13.56 MHz signals from being transmitted on the sensor leads in plasma environments. This results in a more stable and accurate measurement of chuck temperature.
TRUE SURFACE Thermocouple (TST)
TST is a surface temperature sensor designed to reduce error in atmospheric applications where air currents can cause instability in temperature accuracy. A winner of Control Engineering’s 2000 Editor’s Choice Award, the TST achieves superior accuracy through a combination of isothermal design and shielding.
|